Silicon dioxide sacrificial layer etching has become a major surface micromachining method
to fabricate microsensors and microactuators often made of polycrystalline silicon. An …

▪ Abstract Polysilicon surface micromachining is advancing significantly and many new
applications are moving beyond the prototyping phase. Recent technical successes are …

MEMS technology and applications have grown at a tremendous pace, while structural
dimensions have grown smaller and smaller, reaching down even to the molecular level …

Designed for science and engineering students, this text focuses on emerging trends in
processes for fabricating MEMS and NEMS devices. The book reviews different forms of …

The etch rates for 317 combinations of 16 materials (single-crystal silicon, doped, and
undoped polysilicon, several types of silicon dioxide, stoichiometric and silicon-rich silicon …

Surface micromachining is characterized by the fabrication of micromechanical structures
from deposited thin films. Originally employed for integrated circuits, films composed of …

Micromechanical cantilevers are commonly used for detection of small forces in
microelectromechanical sensors (eg, accelerometers) and in scientific instruments (eg …

Due to the smoothness of the surfaces in surface micromachining, large adhesion forces
between fabricated structures and the substrate are encountered. Four major adhesion …

This thesis describes a general system simulation of microelectromechanical systems
(MEMS) based on lumped-parameter modeling. First-order analytic models are derived for …

IC-compatible microelectromechanical intermediate frequency filters using integrated
resonators with Q's in the thousands to achieve filter Q's in the hundreds have been …