Effect of Ti/TiN Thin Film Geometircal Desing on the Response of RTDs

W Filali, E Garoudja, F Lekoui, L Henni… - 2024 2nd …, 2024 - ieeexplore.ieee.org
In this study, a micropatterned thin film resistors were used as a temperature sensors. The
resistance temperature detectors (RTD) are fabricated using the CMOS technology flow …