With the fast development of diffraction-limited storage rings and free electron lasers, the
requirement for ultimate quality X-ray mirror is getting higher and the mirror surface needs to …

Grazing-incidence reflective optics are commonly used in synchrotron radiation and free-
electron laser facilities to transport and focus the emitted X-ray beams. To preserve the …

We describe the conditions required for a set of displaced sub-aperture measurements to
contain sufficient information to reconstruct the stitched mirror profile removing all additive …

To preserve the brightness and coherence of x-rays produced by diffraction-limited-storage-
ring (DLSR) and free-electron-laser (FEL) light sources, beamline optics must have …

For high accuracy X-ray mirror measurement, the analysis and corrections of minute
systematic errors of the measuring instrument are required. As an X-ray mirror metrology …

The development of fully coherent free electron lasers and diffraction limited storage ring x-
ray sources has brought to focus the need for higher performing x-ray optics with …

Autocollimators play an important role in the high-precision testing of the slope errors of X-
ray and large flat mirrors. However, the time-varying errors caused by environmental …

We present our recent research and development effort on the Multi-Pitch Nano-accuracy
Surface Profiler (MPNSP). This metrology instrument is developed to characterize strongly …

Soft X-ray off-axis elliptical mirrors bring new challenges for X-ray mirror metrology. These
highly asymmetrically curved elliptical cylindrical mirrors with a total slope range> 10 mrad …

The advents of fully coherent free electron lasers and diffraction limited synchrotron storage
ring sources of x-rays are catalyzing the development of new, ultra-high accuracy metrology …