Transmission electron imaging with standard scanning electron microscopes (SEMs) can be
implemented simply by equipping the SEM with a readily available transmission detector …

Monte Carlo softwares are widely used to understand the capabilities of electron
microscopes. To study more realistic applications with complex samples, 3D Monte Carlo …

Charging effect frequently occurs when characterizing nonconductive materials using
electrons as probes and/or signals and can impede the acquisition of useful information …

A conventional scanning electron microscope operated in transmission mode (TSEM) was
used for imaging silica, gold and latex nanoparticles. Particles were applied to conventional …

Spectrum simulation is a useful practical and pedagogical tool. Particularly with complex
samples or trace constituents, a simulation can help to understand the limits of the technique …

The requirements on the use of scanning electron microscopy (SEM) as a measurement
technique for the process control of dimensional parameters are most challenging in the …

Abstract Model-based library (MBL) method, based on the fundamental physics of electron-
solid interaction and Monte Carlo simulation of electron transport and secondary electron …

Abstract Scanning Electron Microscopy (SEM) is considered as a reference technique for the
determination of nanoparticle (NP) dimensional properties. Nevertheless, the image …

Critical dimension scanning electron microscope (CD-SEM) metrology has long used
empirical approaches to determine edge locations. While such solutions are very flexible …

Abstract Scanning Electron Microscopy (SEM) technique is widely used to characterize
nanoparticle (NP) size. The landing energy (LE) of the primary electron beam is considered …