A review of piezoelectric MEMS sensors and actuators for gas detection application
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …
Modeling of the PolyMUMPs-Based MEMS Sensor for Application in Trace Gas Detection
Gas detection sensor is crucial in many practical applications. However, numerous of the
existing gas sensors still suffering from high power consumption, damping, and poor …
existing gas sensors still suffering from high power consumption, damping, and poor …
Modelling and Simulation of a Thin-Film Bulk Acoustic Resonator (FBAR) Based Gas Sensor
This work presents the modeling and simulation of a thin film bulk acoustic wave resonator
(FBAR) based gas sensor. The Present FBAR device uses the Al/ZnO/Al stack for the …
(FBAR) based gas sensor. The Present FBAR device uses the Al/ZnO/Al stack for the …