The growing demand for electronic devices, smart devices, and the Internet of Things
constitutes the primary driving force for marching down the path of decreased critical …

In recent years, the use of through-focus (TF) or volumetric type of optical imaging has
gained momentum in several areas such as biological imaging, microscopy, adaptive optics …

Semiconductor chip manufacturing is by far the predominant nanomanufacturing technology
in the world today. Top-down lithography techniques are used for fabrication of logic and …

We present a simple method for size determination of nanoparticles using conventional
optical microscopes. The method, called through-focus scanning optical microscopy, makes …

Through-focus scanning optical microscopy (TSOM) is a new metrology method that
achieves 3D nanoscale measurement sensitivity using conventional optical microscopes; …

We experimentally demonstrate that the three-dimensional (3-D) shape variations of
nanometer-scale objects can be resolved and measured with sub-nanometer scale …

We present results using simulations and experiments to demonstrate metrological
applications of the through-focus scanning optical microscopy (TSOM) down to features at …

Low-cost, high-throughput and nondestructive metrology of truly three-dimensional (3D)
targets for process control/monitoring is a critically needed enabling technology for high …

It is important to economically and non-destructively analyze three-dimensional (3-D)
shapes of nanometer to micrometer scale objects with sub-nanometer measurement …

A large range of high-value manufactured parts require structures to be produced over large
areas (metres squared) at high-resolution (micrometres and smaller). Such manufacturing …