This paper presents a novel structure of capacitance shunt type RF switch for 5G
applications. The proposed RF MEMS switch is having Cantilever type designed with …

This paper addresses the design and manufacturing of a crab-leg based MEMS relay for a
high power application. Thanks to a contact resistance lower than 100 m Ω, the relay can …

First of all, I would like to dedicate this thesis to my father Pao-Tang Liu and my mother
Hsuan Huang who always support me in any ways in my life. Secondly, I also dedicate this …

In this paper, a MEMs relay for high power application is investigated. This relay has to hold
a current of the order of magnitude of the Ampere and is subject to harsh environment such …

Micro-electromechanical system (MEMS) has been one of the most promising technologies
for the 21st century. With this technology, MEMS components are not only depending on the …

Static Analysis of a MEMS (Micro electro mechanical systems) based micro-cantilever beam
using the distributed parameter modeling. The pull-in voltage of the micro-cantilever beam is …

Micro-Electro-Mechanical System (MEMS) actuators are devices that convert electrical
energy to mechanical motion. These actuators are used in a variety of optical, RF, and …

21. Invited talk on “Introduction to MEMS and Making of MEMS and their Applications” in
KSCST sponsored frontier lecture series on science and technology on the occasion of …