Interface sharpness in stacked thin film structures: a comparison of soft X-ray reflectometry and transmission electron microscopy
R Ciesielski, J Bogdanowicz, R Loo… - Journal of Micro …, 2024 - spiedigitallibrary.org
Background A key element of semiconductor fabrication is the precise deposition of thin
films. Among other aspects, the quality of interfaces between different materials plays a …
films. Among other aspects, the quality of interfaces between different materials plays a …