Precursors for direct-write nanofabrication with electrons

S Barth, M Huth, F Jungwirth - Journal of Materials Chemistry C, 2020 - pubs.rsc.org
Focused electron beam-induced deposition (FEBID) is a maskless, direct-write
nanolithography approach for the growth of nanostructures. In recent years, significant …

Focused electron beam induced deposition meets materials science

M Huth, F Porrati, OV Dobrovolskiy - Microelectronic Engineering, 2018 - Elsevier
Focused electron beam induced deposition (FEBID) is a direct-write method for the
fabrication of nanostructures whose lateral resolution rivals that of advanced electron beam …

Review of magnetic nanostructures grown by focused electron beam induced deposition (FEBID)

JM De Teresa, A Fernández-Pacheco… - Journal of Physics D …, 2016 - iopscience.iop.org
We review the current status of the use of focused electron beam induced deposition
(FEBID) for the growth of magnetic nanostructures. This technique relies on the local …

Aberration corrected Lorentz scanning transmission electron microscopy

S McVitie, D McGrouther, S McFadzean, DA MacLaren… - Ultramicroscopy, 2015 - Elsevier
We present results from an aberration corrected scanning transmission electron microscope
which has been customised for high resolution quantitative Lorentz microscopy with the …

Direct writing of CoFe alloy nanostructures by focused electron beam induced deposition from a heteronuclear precursor

F Porrati, M Pohlit, J Müller, S Barth, F Biegger… - …, 2015 - iopscience.iop.org
Recently, focused electron beam-induced deposition has been employed to prepare
functional magnetic nanostructures with potential in nanomagnetic logic and sensing …

Synthesis of individually tuned nanomagnets for nanomagnet logic by direct write focused electron beam induced deposition

M Gavagnin, HD Wanzenboeck, D Belic… - ACS nano, 2013 - ACS Publications
Nanomagnet Logic (NML) is a promising new technology for future logic which exploits
interactions among magnetic nanoelements in order to encode and compute binary …

Focused Ion Beam vs Focused Electron Beam Deposition of Cobalt Silicide Nanostructures Using Single-Source Precursors: Implications for Nanoelectronic Gates …

F Jungwirth, F Porrati, D Knez, M Sistani… - ACS Applied Nano …, 2022 - ACS Publications
Direct-write techniques for the fabrication of nanostructures are of specific interest due to
their ability for a maskless fabrication of any arbitrary three-dimensional shape. To date …

Focused-electron-beam engineering of 3D magnetic nanowires

C Magén, J Pablo-Navarro, JM De Teresa - Nanomaterials, 2021 - mdpi.com
Focused-electron-beam-induced deposition (FEBID) is the ultimate additive nanofabrication
technique for the growth of 3D nanostructures. In the field of nanomagnetism and its …

Tuning shape, composition and magnetization of 3D cobalt nanowires grown by focused electron beam induced deposition (FEBID)

J Pablo-Navarro, D Sanz-Hernández… - Journal of Physics D …, 2017 - iopscience.iop.org
Electron beam induced deposition of 3D cobalt nanowires with simultaneous high metallic
content (≈ 80% at.) and small diameter (< 100 nm) has been achieved by optimization of …

High-purity 3D nano-objects grown by focused-electron-beam induced deposition

R Córdoba, N Sharma, S Kölling, PM Koenraad… - …, 2016 - iopscience.iop.org
To increase the efficiency of current electronics, a specific challenge for the next generation
of memory, sensing and logic devices is to find suitable strategies to move from two-to three …