This paper reviews the latest developments in microwave acoustic wave devices. After an
introduction and brief history of bulk acoustic wave (BAW) and surface acoustic wave (SAW) …

Today, acoustic filters are the filter technology to meet the requirements with respect to
performance dictated by the cellular phone standards and their form factor. Around two …

This paper investigates the applicability of acoustic wave devices using an interdigital
transducer placed on a thin piezoelectric crystal plate to the 3-5-GHz range, where …

In this work, we present a new class of thickness extensional microelectromechanical
resonator, the overmoded bulk acoustic resonator (OBAR) for filtering applications in the 5G …

This paper reports a manufacturable, Periodically Polarized Piezoelectric Film (P3F) Bulk
Acoustic Wave (BAW) resonator using Aluminum Scandium Nitride (AlScN) materials …

This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in
sputtered scandium aluminum nitride (ScAlN). This paper identifies challenges of frequency …

This work reports a 50.74 GHz lithium niobate (LiNbO 3) acoustic resonator with a high
quality factor (Q) of 237 and an electromechanical coupling (k 2) of 5.17% resulting in a …

This article presents the design approach and the first demonstration of a wideband hybrid
monolithic acoustic filter in the K-band, which exceeds the limitation of electromechanical …

This study describes a sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic
resonator (FBAR) at 55.4 GHz. The resonator leverages the third-order symmetric (S3) mode …

In order to reduce the lateral acoustic energy loss of thin film bulk acoustic resonators
(FBARs), the trench structure for FBAR is generally designed to block the leakage of …