Metamaterials are being applied to the development and construction of many new devices
throughout the electromagnetic spectrum. Limitations posed by the metamaterial operational …

The electromagnetic (EM) properties of metasurfaces depend on both structural design and
material properties. microelectromechanical systems (MEMS) technology offers an approach …

Wafer-level heterogeneous integration technologies for microoptoelectromechanical
systems (MOEMS), microelectromechanical systems (MEMS), and nanoelectromechanical …

We present the design and fabrication of MEMS reflectors intended to be part of a
mechanical terahertz (THz) beam steering reflect-array. Each reflector is shifted by a …

Millimeter-wave phase shifters are important components for a wide scope of applications.
An analog-type phase shifter for W-band has been designed, analyzed, fabricated, and …

Cost efficient integration technologies and materials for manufacturing of uncooled infrared
bolometer focal plane arrays (FPA) are presented. The technology platform enables …

This paper proposes a reconfigurable reflective unit cell utilizing micro electro-mechanical
system (MEMS) actuator at Ku band for use in reconfigurable reflective arrays. The proposed …

This paper presents an overview on novel microwave micro-electromechanical systems
(MEMS) device concepts developed in our research group during the last 5 years, which are …

5,300,875 5,363,075 5,387,885 5,717,943 5,900,843 5,912,598 6,005,520 6,037,743
6,127,799 6,212,431 6,285,325 6,597,323 6,603,915 6,735,630 6,771,935 6,841.981 …

(74) Attorney, Agent, or Firm—Oblon, Maier & Neustadt, LLP (57) ABSTRACT Methods and
systems for configuring a leaky wave antenna (LWA) utilizing micro-electromechanical …