After two decades of intensive development, 3-D integration has proven invaluable for
allowing integrated circuits to adhere to Moore's Law without needing to continuously shrink …

This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …

As a powerful enabling technology, three-dimensional (3D) integration, which uses wafer
bonding to integrate multiple wafers in the vertical direction and uses through‑silicon-vias …

Electrothermal micromirrors have become an important type of micromirrors due to their
large angular scanning range and large linear motion. Typically, electrothermal micromirrors …

Early cancer detection has been playing an important role in reducing cancer mortality.
Optical coherence tomography (OCT), due to its micron‐scale resolution, has the ability to …

This paper reports a miniature optical coherence tomography (OCT) probe and high-
resolution 3-D OCT imaging results obtained with this side-view probe. The probe is only 2.8 …

We present an endoscopic probe for optical coherence tomography (OCT) equipped with a
miniaturized hollow ultrasonic motor that rotates the objective lens and provides an internal …

A curved concentric electrothermal actuator has been designed and developed to actuate
circular micromirrors with improved area efficiency, while at the same time achieving large …

We present a novel circumferential-scan endoscopic optical coherence tomography (OCT)
probe by using a circular array of six electrothermal microelectromechanical (MEMS) mirrors …

Ultra-deep through-silicon-vias (TSVs) are of great demand for 3D heterogeneous
integration. However, most reported deep TSVs adopt double-sided silicon etching and …