K Shrinivasan, F Wang, G Kamian, S Gentile… - US Patent …, 2012 - Google Patents
The present invention relates to curing of semiconductor wafers. More particularly, the invention relates to cure chambers containing multiple cure stations, each featuring one or …
B Van Schravendijk, C Denisse - US Patent 8,242,028, 2012 - Google Patents
A method for the ultraviolet (UV) treatment of etch stop and hard mask film increases etch selectivity and hermeticity by removing hydrogen, cross-linking, and increasing density. The …
B Van Schravendijk, W Crew - US Patent 7,851,232, 2010 - Google Patents
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K Lionti, W Volksen, T Magbitang… - ECS Journal of Solid …, 2014 - iopscience.iop.org
The increasing sensitivity of porous low dielectric constant materials to process damage constitutes a major roadblock to their implementation in back-end-of-the-line (BEOL) wiring …
Porous insulators are utilized in the wiring structure of microelectronic devices as a means of reducing, through low dielectric permittivity, power consumption and signal delay in …
B Varadarajan, GA Antonelli… - US Patent …, 2018 - Google Patents
Abstract Treatment of carbon-containing low-k dielectric with UV radiation and a reducing agent enables process-induced damage repair. Also, treatment with a reducing agent and …
BN Varadarajan, KM McLaughlin… - US Patent …, 2013 - Google Patents
(57) ABSTRACT A method for the ultraviolet (UV) treatment of carbon-con taining low-k dielectric and associated apparatus enables pro cess induced damage repair. The methods …
K Shrinivasan, M Rivkin, E Smargiassi… - US Patent …, 2013 - Google Patents
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may be practiced …
B Varadarajan, G Jiang, SK Reddy, JS Sims - US Patent 8,211,510, 2012 - Google Patents
Reference will now be made in detail to specific embodi ments of the invention. Examples of the specific embodi ments are illustrated in the accompanying drawings. While the invention …