Microwave discharges (MD) are widely used as a source of non-equilibrium low pressure
plasma for different applications. This paper reviews the methods of microwave plasma …

Carbon Nanotubes (CNTs) possess a unique one-dimensional molecular geometry with a
large surface area. Recently, CNTs have become a thrust area of research as they play a …

Investigating the mechanism behind the high-efficiency deposition of high-quality diamond
has always been a prominent topic in related research. This paper investigates the CH 4-H 2 …

Without any heating assistance, a gas mixture of monomethylsilane, nitrogen and argon was
used at 10–20 Pa for 5 min for forming a SiC x N y O z film under parallel plate plasma. By …

We investigate by modeling supported by experiments the role of oxygen in carbon
nanotubes (CNT) growth by plasma enhanced chemical vapor deposition (PECVD) process …

In order to study the multimolecular interactions for the SiC x N y O z film formation by the
parallel plate plasma-enhanced chemical vapor deposition without heat assistance, the …

Abstract A 50–500 nm-thick SiC x N y O z film was formed in parallel plate plasma at room
temperature using a gas mixture of monomethylsilane, nitrogen and argon at 10− 30 Pa for 5 …

In this wor#, diamond-li# e carbon (DLC) thin films were prepared from Cyclohexane. Thin
films were deposited on quartz substrate by atmospheric pressure Argon plasma jet system …

Diamond-like carbon (DLC) merupakan material karbon yang dapat dideposisikan sebagai
bahan pelapis pada substrat logam. Deposisi material DLC ini dapat dilakukan pada proses …

Niniejsza praca dotyczy modelowania maj acego na celu wyznaczenie temperatur panuj
acych w reaktorze plazmy mikrofalowej. W symulacjach tych wykorzystano dwie metody …