Quantitative analysis of backscattered electron (BSE) contrast using low voltage scanning electron microscopy (LVSEM) and its application to Al0. 22Ga0. 78N/GaN …

AG Cid, R Rosenkranz, M Löffler, A Clausner… - Ultramicroscopy, 2018 - Elsevier
A novel method to quantify and predict the material contrast using Backscattered Electron
(BSE) imaging in Scanning Electron Microscopy (SEM) is presented while using low primary …