This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-
film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS …

Integration of electrostatically driven and capacitively transduced MEMS resonators in
commercial CMOS technologies is discussed. A figure of merit to study the performance of …

This letter presents the design, fabrication, and demonstration of a CMOS–MEMS filter
based on two high-Q submicrometer-scale clamped–clamped beam resonators with …

The actuation of biologically functional micro-and nanomechanical structures using optical
excitation is an emerging arena of research that couples the fields of optics, fluidics …

This paper presents a passive wireless microelectromechanical systems (MEMS) sensor
consisting of an antenna directly matched to a MEMS resonator. When the sensor is …

A micro-scale resonator suspended over a substrate and illuminated with a continuous wave
(CW) laser forms an interferometer which couples deflection of the resonator to light …

This paper presents the characterization results of the release step with vapor hydrofluoric
acid on a Complementary Metal Oxide Semiconductor-Microelectromechanical Systems …

We present experimental results on the release of MEMS devices manufactured using the
standard CMOS interconnection metal layers as structural elements and the insulating …

This paper presents an investigation of the dynamics of microbeams under multiple
harmonic electrostatic excitation frequencies. First, the response of a cantilever microbeam …