Exploring crystal recovery and dopant activation in coated laser annealing on ion implanted...

Advanced strategies for high activation in ion implanted 4H-SiC by laser annealing

C Calabretta, A Pecora, M Agati… - … and Multi-Physics …, 2024 - ieeexplore.ieee.org
The study aimed to extensively characterize the effects of XeCl multishot laser irradiation on
P and Al implanted 4H-SiC epitaxial layers with varying thicknesses of graphitic coating at …
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