H Matsuura, K Aso, S Kagamihara, H Iwata… - Applied physics …, 2003 - pubs.aip.org
From the temperature dependence of the hole concentration p (T) in a lightly Al-doped 4H-
SiC epilayer, an Al acceptor with∼ 200 meV and an unknown defect with∼ 370 meV are …