CJ Ramos-Cano, M Miki-Yoshida,
R Herrera-Basurto… - Applied Physics A, 2023 - Springer
Abstract Ferroelectric (piezoelectric) Pb (Zr0. 52Ti0. 48) O3 (PZT) films were synthesized
using an aerosol-assisted chemical vapor deposition technique on (111) Pt/Ti/SiO2/Si …