Expected failures in 3-D technology and related failure analysis challenges

I De Wolf, K Croes, E Beyne - IEEE Transactions on …, 2018 - ieeexplore.ieee.org
After an introduction to 3-D technology, and through silicon via (TSV)-and stacking options,
this paper provides an overview of failures that can be expected in 3-D technology and lists …

Defect analysis using scanning acoustic microscopy for bonded microelectronic components with extended resolution and defect sensitivity

S Brand, G Vogg, M Petzold - Microsystem Technologies, 2018 - Springer
Ongoing trends in microelectronics aim at continuously increasing the integration rate and
complexity of microelectronic systems and devices. Novel integration technologies that arise …

Failure Analysis in Advanced Driver Assistance Systems

Y Li, H Shi - Advanced Driver Assistance Systems and Autonomous …, 2022 - Springer
Failure analysis (FA) could provide timely feedback to process optimization and solution
paths for system failures; thus, it is critical for the development of advanced driver assistance …

3-D technology: Failure analysis challenges

I De Wolf - EDFA Technical Articles, 2016 - dl.asminternational.org
Chip-level 3D integration, where chips are thinned, stacked, and vertically interconnected
using TSVs and microbumps, brings as many challenges as it does improvements …

Copper Through Silicon Vias Studied by Photo-elastic Scanning Infrared Microscopy

M Herms, M Wagner, I De Wolf - Microelectronics Reliability, 2016 - Elsevier
The in-plane stress distribution in copper through silicon vias (TSV) ensembles of different
design has been studied by the scanning infrared stress explorer (SIREX). SIREX is a …

A photo‐elastic microscopy study of the temperature dependency of stress induced by through silicon vias in silicon

M Herms, M Wagner, J De Messemaeker… - … status solidi c, 2017 - Wiley Online Library
SIREX (Scanning Infrared Stress Explorer) is a photo‐elastic microscope in this case
applied to characterize the temperature dependence of stress induced by copper Through …

Recovering contacting interfaces in packaging and in semiconductor devices: Mechanisms and how to handle them in analysis

P Jacob, C Pecnik, G Nicoletti… - 2016 IEEE 23rd …, 2016 - ieeexplore.ieee.org
Several analysis cases reported contact problems on both device and packaged level.
However, they recovered upon the attempt to electrically verify them. Further analysis …

[引用][C] 3-D TECHNOLOGY: FAILURE ANALYSIS CHALLENGES

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