[HTML][HTML] A review of piezoelectric MEMS sensors and actuators for gas detection application
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …
VOCs sensors based on bulk acoustic resonators: a comprehensive review
In this paper, the hazardous effects of various volatile organic compounds (VOCs) on human
health and its detection methods have been discussed. This paper also presents the …
health and its detection methods have been discussed. This paper also presents the …
Hybrid Film Bulk Acoustic Resonator Fabricated Using a Single Bragg Reflector
Film bulk acoustic resonators (FBARs) with air cavities for sensing and high radio-frequency
filters often exhibit reliability and yield strength issues during bulk etching of the silicon …
filters often exhibit reliability and yield strength issues during bulk etching of the silicon …
FEM modeling and simulation of SMFBAR sensor with PIB as sensing layer for tetrachloroethane (PCE) gas detection
This paper represents the design and FEM modeling of solidly mounted film bulk acoustic
resonator (SMFBAR) gas sensor, based on ZnO, for Tetrachloroethane (PCE) gas detection …
resonator (SMFBAR) gas sensor, based on ZnO, for Tetrachloroethane (PCE) gas detection …
[HTML][HTML] 3D simulation-based acoustic wave resonator analysis and validation using novel finite element method software
RY Vidana Morales, S Ortega Cisneros… - Sensors, 2021 - mdpi.com
This work illustrates the analysis of Film Bulk Acoustic Resonators (FBAR) using 3D Finite
Element (FEM) simulations with the software OnScale in order to predict and improve …
Element (FEM) simulations with the software OnScale in order to predict and improve …
[HTML][HTML] Effects of thermal annealing on the characteristics of high frequency fbar devices
YC Chang, YC Chen, BR Li, WC Shih, JM Lin… - Coatings, 2021 - mdpi.com
In this study, piezoelectric zinc oxide (ZnO) thin film was deposited on the Pt/Ti/SiN x/Si
substrate to construct the FBAR device. The Pt/Ti multilayers were deposited on SiN x/Si as …
substrate to construct the FBAR device. The Pt/Ti multilayers were deposited on SiN x/Si as …
[HTML][HTML] Fabrication of AlGaN high frequency bulk acoustic resonator by reactive RF magnetron co-sputtering system
YC Chang, YC Chen, CC Cheng - Materials, 2021 - mdpi.com
In this study, aluminum gallium nitride (AlGaN) thin films are used as the piezoelectric layers
to fabricate solidly mounted resonators (SMR) for high frequency acoustic wave devices …
to fabricate solidly mounted resonators (SMR) for high frequency acoustic wave devices …
Improved frequency response of the 3.5 GHz SMR devices using Ga-doped AlN thin films as the piezoelectric layers
YC Chang, YC Chen, RT Huang, YT Chen… - … Physics Letters B, 2022 - World Scientific
In this paper, the aluminum nitride (AlN) and gallium-doped aluminum nitride (AlGaN) films
are adopted to fabricate the 3.5 GHz solidly mounted resonator (SMR) devices. A reactive …
are adopted to fabricate the 3.5 GHz solidly mounted resonator (SMR) devices. A reactive …
Finite Element Analysis of PCE Gas Sensor Based on Acoustic Resonator
R Patel, SK Tripathi - 2023 International Conference on IoT …, 2023 - ieeexplore.ieee.org
In this work, Tetrachloroethane (PCE) gas is detected using a gas sensor with a properly
designed and FEM-modeled SMFBAR. Parametric sweep analysis is used to find the impact …
designed and FEM-modeled SMFBAR. Parametric sweep analysis is used to find the impact …