Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments
Capacitive radio frequency (RF) discharge plasmas have been serving hi-tech industry (eg
chip and solar cell manufacturing, realization of biocompatible surfaces) for several years …
chip and solar cell manufacturing, realization of biocompatible surfaces) for several years …
The electrical asymmetry effect in geometrically asymmetric capacitive radio frequency plasmas
The electrical asymmetry effect (EAE) allows an almost ideal separate control of the mean
ion energy,< E i>, and flux, Γ i, at the electrodes in capacitive radio frequency discharges …
ion energy,< E i>, and flux, Γ i, at the electrodes in capacitive radio frequency discharges …
The magnetic asymmetry effect in geometrically asymmetric capacitively coupled radio frequency discharges operated in Ar/O2
M Oberberg, B Berger, M Buschheuer… - Plasma Sources …, 2020 - iopscience.iop.org
Previous studies in low pressure magnetized capacitively coupled radio frequency (RF)
plasmas operated in argon with optimized geometric reactor symmetry have shown that the …
plasmas operated in argon with optimized geometric reactor symmetry have shown that the …
Magnetic control of nonlinear electron resonance heating in a capacitively coupled radio frequency discharge
M Oberberg, D Engel, B Berger, C Wölfel… - Plasma Sources …, 2019 - iopscience.iop.org
In magnetized capacitively coupled radio frequency (RF) plasmas operated at low pressure,
the magnetic asymmetry effect (MAE) provides the opportunity to control the discharge …
the magnetic asymmetry effect (MAE) provides the opportunity to control the discharge …
Nonlinear series resonance and standing waves in dual-frequency capacitive discharges
DQ Wen, E Kawamura, MA Lieberman… - Plasma Sources …, 2016 - iopscience.iop.org
It is well-known that the nonlinear series resonance in a high frequency capacitive discharge
enhances the electron power deposition and also creates standing waves which produce …
enhances the electron power deposition and also creates standing waves which produce …
Theoretical approach for plasma series resonance effect in geometrically symmetric dual radio frequency plasma
Plasma series resonance (PSR) effect is well known in geometrically asymmetric
capacitively couple radio frequency plasma. However, plasma series resonance effect in …
capacitively couple radio frequency plasma. However, plasma series resonance effect in …
Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas
The self-excitation of plasma series resonance (PSR) oscillations plays an important role in
the electron heating dynamics in capacitively coupled radio-frequency (CCRF) plasmas. In a …
the electron heating dynamics in capacitively coupled radio-frequency (CCRF) plasmas. In a …
On the electrical asymmetry effect in large area multiple frequency capacitively coupled plasmas
S Bienholz, T Styrnoll… - Journal of Physics D …, 2014 - iopscience.iop.org
Recently, many publications have dealt with the electrical asymmetry effect in capacitively
coupled radio frequency-discharges. The idea of this concept is the possibility of controlling …
coupled radio frequency-discharges. The idea of this concept is the possibility of controlling …
Controlling plasma properties under differing degrees of electronegativity using odd harmonic dual frequency excitation
The charged particle dynamics in low-pressure oxygen plasmas excited by odd harmonic
dual frequency waveforms (low frequency of 13.56 MHz and high frequency of 40.68 MHz) …
dual frequency waveforms (low frequency of 13.56 MHz and high frequency of 40.68 MHz) …
Simulation of nonlinear standing wave excitation in very-high-frequency asymmetric capacitive discharges: roles of radial plasma density profile and rf power
FJ Zhou, K Zhao, DQ Wen, JK Liu… - … Sources Science and …, 2021 - iopscience.iop.org
It is recognized that in large-area, very-high-frequency capacitively coupled plasma (VHF
CCP) reactors, the higher harmonics generated by nonlinear sheath motion can lead to …
CCP) reactors, the higher harmonics generated by nonlinear sheath motion can lead to …