Frequency-modulated mems gyroscopes: A review

X Ren, X Zhou, S Yu, X Wu, D Xiao - IEEE sensors journal, 2021 - ieeexplore.ieee.org
As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based
on MEMS craft has attracted more and more attention in recent years, owing to its …

Frequency modulated MEMS gyroscopes: Recent developments, challenges and outlook

G Langfelder, P Minotti, V Zega, C Comi… - … Conference on Solid …, 2019 - ieeexplore.ieee.org
After more than ten years of researches by different groups, this work summarizes the
various frequency-modulated techniques for microelectromechanical system (MEMS) based …

1.5-million Q-factor vacuum-packaged birdbath resonator gyroscope (BRG)

JY Cho, JK Woo, G He, D Yang, C Boyd… - 2019 IEEE 32nd …, 2019 - ieeexplore.ieee.org
We report a vacuum-packaged fused-silica (FS) micro birdbath shell resonator gyroscope
(BRG) with near-navigation-grade in-run (evaluation duration day) bias stability of 0.0103 …

A digital control structure for Lissajous frequency-modulated mode MEMS gyroscope

X Wang, X Zheng, Y Shen, C Xia, G Liu… - IEEE Sensors …, 2022 - ieeexplore.ieee.org
This article proposes a digital control structure for a doubly decoupled gyroscope working in
the Lissajous frequency-modulated (LFM) mode based on digital phase-locked loops …

Fully Integrated, 406 A, /hr, Full Digital Output Lissajous Frequency-Modulated Gyroscope

M Leoncini, M Bestetti, A Bonfanti… - IEEE Transactions …, 2018 - ieeexplore.ieee.org
In this paper, a complete system of a frequency-modulated gyroscope with digital output for
future low-power, high-stability, and wide full-scale applications is presented. The system …

A MEMS coriolis-based mass-flow-to-digital converter for low flow rate sensing

AC De Oliveira, S Pan, RJ Wiegerink… - IEEE Journal of Solid …, 2022 - ieeexplore.ieee.org
This article presents a microelectromechanical system (MEMS) Coriolis-based mass-flow-to-
digital converter (DC) that can be used with both liquids and gases. It consists of a …

Direct phase measurement and compensation to enhance MEMS gyroscopes ZRO stability

LG Pagani, L Guerinoni, L Falorni… - Journal of …, 2021 - ieeexplore.ieee.org
This research introduces a closed-loop method to improve the zero-rate output (ZRO)
stability of amplitude-modulated (AM) capacitive MEMS gyroscopes, even in absence of …

An automatic MEMS gyroscope mode matching circuit based on noise observation

M Marx, X Cuignet, S Nessler… - … on Circuits and …, 2019 - ieeexplore.ieee.org
The performance of microelectromechanical system (MEMS) gyroscopes can be significantly
enhanced by matching the resonance frequencies of the drive and sense mechanical …

Thermal characterization of scale-factor and zero-rate offset in near-navigation-grade NEMS-based gyroscopes

A Buffoli, M Gadola, M Sansa, P Rey… - 2022 IEEE 35th …, 2022 - ieeexplore.ieee.org
This work presents further advancements on miniaturized gyroscopes based on NEMS
sensing, towards navigation grade applications, discussing in particular the thermal …

In-run scale factor compensation for MEMS gyroscope without calibration and fitting

J Jia, X Ding, Z Qin, Z Ruan, H Li - IEEE Sensors Journal, 2020 - ieeexplore.ieee.org
This paper presents an in-run scale factor error compensation for the micro-electro-
mechanical system (MEMS) gyroscope without system calibration and data fitting. The …