Piezoelectric actuation<? pag\break?> for integrated photonics
Recent decades have seen significant advancements in integrated photonics, driven by
improvements in nanofabrication technology. This field has been developed from integrated …
improvements in nanofabrication technology. This field has been developed from integrated …
High-Accuracy Prediction of ScAlN Thin Film Dry Etching Using Machine Learning Driven Regression Modeling
Scandium aluminum nitride (ScAlN) demonstrates notable properties such as high
electromechanical coupling, low dielectric permittivity, reduced acoustic losses, and so on …
electromechanical coupling, low dielectric permittivity, reduced acoustic losses, and so on …