Open benchmarks for assessment of process monitoring and fault diagnosis techniques: A review and critical analysis

A Melo, MM Câmara, N Clavijo, JC Pinto - Computers & Chemical …, 2022 - Elsevier
The present paper brings together openly available datasets and simulators for testing of
process monitoring and fault diagnosis techniques. Some general characteristics of these …

Toward a quantitative survey of dimension reduction techniques

M Espadoto, RM Martins, A Kerren… - IEEE transactions on …, 2019 - ieeexplore.ieee.org
Dimensionality reduction methods, also known as projections, are frequently used in
multidimensional data exploration in machine learning, data science, and information …

[HTML][HTML] Machine learning for semiconductors

DY Liu, LM Xu, XM Lin, X Wei, WJ Yu, Y Wang, ZM Wei - Chip, 2022 - Elsevier
Thanks to the increasingly high standard of electronics, the semiconductor material science
and semiconductor manufacturing have been booming in the last few decades, with massive …

Feature selection with harmony search

R Diao, Q Shen - IEEE Transactions on Systems, Man, and …, 2012 - ieeexplore.ieee.org
Many search strategies have been exploited for the task of feature selection (FS), in an effort
to identify more compact and better quality subsets. Such work typically involves the use of …

Bagging ensemble-based novel data generation method for univariate time series forecasting

D Kim, JG Baek - Expert Systems with Applications, 2022 - Elsevier
The most critical issue in time series data is predicting future data values. Recently, an
ensemble model combining multiple models with superior predictive performance has …

An evidential analytics for buried information in big data samples: Case study of semiconductor manufacturing

YC Ko, H Fujita - Information Sciences, 2019 - Elsevier
The big data samples are important source for analytics. However, its relevant/irrelevant
information, unspecified variables/scales, noise/null, and so forth impose huge challenges …

A novel dimension reduction and dictionary learning framework for high-dimensional data classification

Y Li, Y Chai, H Zhou, H Yin - Pattern Recognition, 2021 - Elsevier
High-dimensional problem poses significant challenges for dictionary learning based
classification architecture. Joint Dimension Reduction and Dictionary Learning (JDRDL) …

[PDF][PDF] Predictive models for equipment fault detection in the semiconductor manufacturing process

S Munirathinam, B Ramadoss - IACSIT International Journal of …, 2016 - researchgate.net
Semiconductor manufacturing is one of the most technologically and highly complicated
manufacturing processes. Traditional machine learning algorithms such as uni-variate and …

Machine learning-based techniques for fault diagnosis in the semiconductor manufacturing process: a comparative study

AA Nuhu, Q Zeeshan, B Safaei… - The Journal of …, 2023 - Springer
Industries are going through the fourth industrial revolution (Industry 4.0), where
technologies like the Industrial Internet of things, big data analytics, and machine learning …

Mutually-exclusive-and-collectively-exhaustive feature selection scheme

CY Lee, BS Chen - Applied Soft Computing, 2018 - Elsevier
In the fields of machine learning and data mining, feature selection methods are used to
identify the most cost-effective predictors and to give a deeper understanding of pattern …