Optical metrology is one of the key technologies in today's manufacturing industry. In this
article, we provide an insight into optical measurement technologies for precision …

On-machine and in-process surface metrology are important for quality control in
manufacturing of precision surfaces. The classifications, requirements and tasks of on …

Dispersion is a very common phenomenon in the broadband optical systems. Chromatic
confocal technology uses the chromatic aberration of lens to decode the axial displacement …

This paper provides an overview of state-of-the-art sensing and machine learning
technologies for intelligent measurement in smart and precision manufacturing. Length …

Chromatic confocal technology is widely used for precise, steady, and efficient displacement
measurement in many industrial fields. It employs the confocal and dispersion principles to …

We developed a practical Line-Scanning Chromatic Confocal Sensor (LSCCS) that can
generate three-dimensional (3D) points with up to 32 000/s with a high-precision motion …

Characterization of the displacement response is critical for accurate chromatic confocal
measurement. Current characterization methods usually provide a linear or polynomial …

Accurate overlapping-peaks extraction plays a critical role in chromatic confocal thickness
measurement of ultra-thin transparent film. However, the current algorithms usually appear …

A measurement method based on a confocal probe on the second harmonic generation that
can measure linear and angular displacements in the focusing point is proposed. In the …

The confocal probe is one of the most well-used optical sensors for displacement/position
measurement as well as for mapping of three-dimensional microstructured surfaces and …