A review on fabrication of blazed gratings

J Gao, P Chen, L Wu, B Yu, L Qian - Journal of Physics D …, 2021 - iopscience.iop.org
Ultra-precision manufacturing plays a critical role in the successful development of various
technological fields and has a significant influence on the processes conducted in human …

High‐performance, high‐index‐contrast chalcogenide glass photonics on silicon and unconventional non‐planar substrates

Y Zou, D Zhang, H Lin, L Li, L Moreel… - Advanced Optical …, 2014 - Wiley Online Library
This paper reports a versatile technique for the fabrication of high‐index‐contrast photonic
structures on both silicon and plastic substrates. The fabrication technique combines low …

EUV imaging and spectroscopy for improved space weather forecasting

L Golub, P Cheimets, EE DeLuca… - Journal of Space …, 2020 - swsc-journal.org
Accurate predictions of harmful space weather effects are mandatory for the protection of
astronauts and other assets in space, whether in Earth or lunar orbit, in transit between solar …

Fabrication of ultrahigh aspect ratio freestanding gratings on silicon-on-insulator wafers

M Ahn, RK Heilmann, ML Schattenburg - Journal of Vacuum Science & …, 2007 - pubs.aip.org
The authors report a silicon-on-insulator (SOI) process for the fabrication of ultrahigh aspect
ratio freestanding gratings for high efficiency x-ray and extreme ultraviolet spectroscopy …

Demonstration of resolving power λ/Δλ> 10,000 for a space-based x-ray transmission grating spectrometer

RK Heilmann, J Kolodziejczak, AR Bruccoleri… - Applied Optics, 2019 - opg.optica.org
We present measurements of the resolving power of a soft x-ray spectrometer consisting of
200 nm period lightweight, alignment-insensitive critical-angle transmission (CAT) gratings …

Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands

RK Heilmann, M Ahn, A Bruccoleri, CH Chang… - Applied …, 2011 - opg.optica.org
We report on measurements of the diffraction efficiency of 200-nm-period freestanding
blazed transmission gratings for wavelengths in the 0.96 to 19.4? nm range. These critical …

Efficiency of a grazing-incidence off-plane grating in the soft-x-ray region

JF Seely, LI Goray, B Kjornrattanawanich… - Applied Optics, 2006 - opg.optica.org
Efficiency measurements of a grazing-incidence diffraction grating in the off-plane mount
were performed using polarized synchrotron radiation. The grating had 5000 grooves/mm …

Line spread functions of blazed off-plane gratings operated in the Littrow mounting

CT DeRoo, RL McEntaffer, DM Miles… - Journal of …, 2016 - spiedigitallibrary.org
Future soft x-ray (10 to 50 Å) spectroscopy missions require higher effective areas and
resolutions to perform critical science that cannot be done by instruments on current …

Application of the rigorous method to x-ray and neutron beam scattering on rough surfaces

LI Goray - Journal of Applied Physics, 2010 - pubs.aip.org
The paper presents a comprehensive numerical analysis of x-ray and neutron scattering
from finite-conducting rough surfaces which is performed in the frame of the boundary …

Fabrication of 200 nm period centimeter area hard x-ray absorption gratings by multilayer deposition

SK Lynch, C Liu, NY Morgan, X Xiao… - Journal of …, 2012 - iopscience.iop.org
We describe the design and fabrication trials of x-ray absorption gratings of 200 nm period
and up to 100: 1 depth-to-period ratios for full-field hard x-ray imaging applications. Hard x …