Frequency-modulated mems gyroscopes: A review
X Ren, X Zhou, S Yu, X Wu, D Xiao - IEEE sensors journal, 2021 - ieeexplore.ieee.org
As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based
on MEMS craft has attracted more and more attention in recent years, owing to its …
on MEMS craft has attracted more and more attention in recent years, owing to its …
A new MEMS three-axial frequency-modulated (FM) gyroscope: A mechanical perspective
Abstract Micro-Electro-Mechanical Systems (MEMS) gyroscopes are inertial sensors for the
measurement of angular rates. They have a variety of applications from consumer …
measurement of angular rates. They have a variety of applications from consumer …
A dual-mass frequency-modulated (FM) pitch gyroscope: Mechanical design and modelling
Frequency-modulated (FM) Micro-Electro-Mechanical Systems (MEMS) gyroscopes have
been recently proposed as a valid alternative to their amplitude-modulated (AM) counterpart …
been recently proposed as a valid alternative to their amplitude-modulated (AM) counterpart …
Highly sensitive MEMS frequency modulated accelerometer with small footprint
EE Moreira, B Kuhlmann, FS Alves, RA Dias… - Sensors and Actuators A …, 2020 - Elsevier
A single-axis resonant MEMS accelerometer is presented here. The goal is to achieve the
maximum sensitivity on a set of predefined constraints: small footprint of 500 μm× 500 μm …
maximum sensitivity on a set of predefined constraints: small footprint of 500 μm× 500 μm …
Small size and highly sensitive differential MEMS accelerometer based on double-ended tuning fork resonators
EE Moreira, B Kuhlmann, J Gaspar… - … Conference on Solid …, 2019 - ieeexplore.ieee.org
Here, a frequency modulated MEMS accelerometer encapsulated in vacuum is presented.
The small size (0.25 mm 2) and the capability of encapsulation at low pressures (≈ 150 Pa) …
The small size (0.25 mm 2) and the capability of encapsulation at low pressures (≈ 150 Pa) …
Single-resonator, time-switched FM MEMS accelerometer with theoretical offset drift complete cancellation
The work presents the first frequency modulated (FM) accelerometer operating in time-
switched differential mode: readout is based on a double sampling of the oscillation …
switched differential mode: readout is based on a double sampling of the oscillation …