Temperature mapping using single wavelength pyrometry during epitaxial growth
B Paquette, B Gsib, R Arès - Journal of Vacuum Science & Technology …, 2011 - pubs.aip.org
Epitaxial substrate temperature remains one of the most important parameters to control
during deposition for the production of heterostructures with a high level of quality and …
during deposition for the production of heterostructures with a high level of quality and …