Sockets for microassembly

K Tsui, A Geisberger - US Patent 7,025,619, 2006 - Google Patents
An apparatus including at least three deflectable members each configured to deflect during
assembly with a component, and also configured to remain in contact with the component …

MEMS based charged particle deflector design

R Saini, Z Jandric, D Tuggle - US Patent 6,956,219, 2005 - Google Patents
A microcolumn including a plurality of beam modification components coupled to an
assembly substrate, wherein the plurality of beam modification components includes:(1) an …

On-chip reflectron and ion optics

GF Verbeck IV, K Tsui - US Patent 7,605,377, 2009 - Google Patents
(57) ABSTRACT A microelectronics apparatus comprising a substrate, a pair of grid
electrodes coupled to the Substrate on opposing sides of a central axis, wherein the grid …

Method of manufacturing a microcomponent assembly

E Nilsen, MD Ellis, CL Goldsmith, JB Lee… - US Patent …, 2006 - Google Patents
A new process and structure for microcomponent interconnection utilizing a post-assembly
activated junction compound. In one embodiment, first and second microcomponents having …

Microconnectors and non-powered microassembly therewith

K Tsui, A Geisberger, G Skidmore - US Patent 6,923,669, 2005 - Google Patents
BACKGROUND The present disclosure relates generally to MEMS devices, more
specifically, to non-powered MEMS micro connectors and microassembly there with …

Compact microcolumn for automated assembly

R Saini, Z Jandric - US Patent 7,081,630, 2006 - Google Patents
A microcolumn including an assembly substrate and a plurality of beam modification
components. The assembly substrate includes a plurality of sockets, and the beam …

Multiple degree of freedom micro electro-mechanical system positioner and actuator

ML Culpepper, SC Chen - US Patent 7,451,596, 2008 - Google Patents
(57) ABSTRACT A micro electro-mechanical system (MEMS) positioner, including an
actuator and method for making the same, includes a stage formed within a first layer of …

Electro-thermal scratch drive actuator

N Sarkar, A Geisberger, M Ellis - US Patent 6,877,316, 2005 - Google Patents
(57) ABSTRACT A Scratch drive actuator (SDA) device comprising a drive shoe and an
actuator. The drive shoe has a first drive shoe position and a Second drive Shoe position …

Integrated system for simultaneous inspection and manipulation

BE Layton, G Buzby - US Patent 7,647,848, 2010 - Google Patents
A base unit for integrating an imaging device, such as an atomic force microscope, and a
manipulation device, such as a nano-manipulator. The integration of the two devices permits …

Bounce drive actuator and micromotor

A Horng, IY Huang, GM Chen - US Patent App. 11/812,409, 2008 - Google Patents
Provided is the design and fabrication of the novel bounce drive actuator (BDA) for the
development of a new-type micro rotary motor. Although the scratch drive actuator (SDA) …