K Murai, H Onozeki, D Kang, K Hirano… - 2023 IEEE 73rd …, 2023 - ieeexplore.ieee.org
Today, various heterogeneously integrated package structures have been studying, for
example, 2.1 D, 2.3 D, and 2.5 D advanced package. Especially, the 2.5 D package using …