Q Ma, HM Zheng, Y Shao, B Zhu,
WJ Liu… - Nanoscale research …, 2018 - Springer
Abstract Atomic-layer-deposition (ALD) of In 2 O 3 nano-films has been investigated using
cyclopentadienyl indium (InCp) and hydrogen peroxide (H 2 O 2) as precursors. The In 2 O 3 …