Imaging using cylindrical vector beams in a high-numerical-aperture microscopy system

R Chen, K Agarwal, CJR Sheppard, X Chen - Optics letters, 2013 - opg.optica.org
Imaging of object structures using cylindrical vector beams in an aplanatic solid immersion
lens (SIL) microscope is investigated. Based on a complete optical model of an aplanatic SIL …

Unconventional polarization states: beam propagation, focusing, and imaging

TG Brown - Progress in Optics, 2011 - Elsevier
Unconventional polarization states are light fields that depart from uniformly polarized, beam-
like descriptions. Originally studied in the context of waveguide modes and laser cavities …

Multipole theory for tight focusing of polarized light, including radially polarized and other special cases

TX Hoang, X Chen, CJR Sheppard - Journal of the Optical Society of …, 2011 - opg.optica.org
A multipole expansion, based on spherical harmonics, provides an efficient method for
calculating the field in the focal region of a lens for radially polarized illumination, or other …

Dyadic Green's function for aplanatic solid immersion lens based sub-surface microscopy

L Hu, R Chen, K Agarwal, CJR Sheppard… - Optics …, 2011 - opg.optica.org
We present the derivation of the dyadic Green's function for the aplanatic solid immersion
lens based microscopy system. The presented dyadic Green's function is general and is …

A complete and computationally efficient numerical model of aplanatic solid immersion lens scanning microscope

R Chen, K Agarwal, CJR Sheppard, JCH Phang… - Optics express, 2013 - opg.optica.org
This paper presents a computational model for modeling an aplanatic solid immersion lens
scanning microscope. The scanning microscope model consists of three subsystems, each …

Crossing the resolution limit in near-infrared imaging of silicon chips: targeting 10-nm node technology

K Agarwal, R Chen, LS Koh, CJR Sheppard, X Chen - Physical Review X, 2015 - APS
The best reported resolution in optical failure analysis of silicon chips is 120-nm half pitch
demonstrated by Semicaps Private Limited, whereas the current and future industry …

Interpretation of the scattering mechanism for particles in a focused beam

TX Hoang, X Chen, CJR Sheppard - … Review A—Atomic, Molecular, and Optical …, 2012 - APS
Light scattering by two cases, a hemispherical solid immersion lens (HSIL) and a sphere
when illuminated by a focused polarized beam, are discussed. There is a difference …

Complete modeling of subsurface microscopy system based on aplanatic solid immersion lens

R Chen, K Agarwal, Y Zhong, CJR Sheppard… - JOSA A, 2012 - opg.optica.org
A general model of a subsurface microscopy system based on an aplanatic solid immersion
lens (ASIL) is presented. This model is composed of three components: generation of …

Resolution of aplanatic solid immersion lens based microscopy

R Chen, K Agarwal, CJR Sheppard, JCH Phang… - JOSA A, 2012 - opg.optica.org
We study the resolution of a subsurface microscopy system based on the use of an aplanatic
solid immersion lens. Resolution limits under various criteria are calculated theoretically as …

Rigorous analytical modeling of high-aperture focusing through a spherical interface

TX Hoang, X Chen, CJR Sheppard - JOSA A, 2013 - opg.optica.org
High-aperture focusing through a spherical interface has been employed in optical data
storage, photolithography, and especially microscopy. This paper first forms an approximate …