This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

Back in December 1959, future Nobel laureate Richard Feynman gave a visionary and now
oft-quoted talk entitled “There's Plenty of Room at the Bottom.” The occasion was an …

This paper reports on a new type of microresonators enabled by micromachining of ion
sliced X-cut LiNbO 3 thin films. In operation, the device is excited into lateral vibrations, thus …

This paper provides a comprehensive review of advanced radio frequency (RF) filter
technologies available in miniature chip or integrated circuit (IC) form for wireless …

This work makes an overview of the progress made during the last decade with regard to a
novel class of piezoelectric microwave devices employing acoustic Lamb waves in …

Ordering of ferroelectric polarization and its trajectory in response to an electric field are
essential for the operation of non-volatile memories, transducers and electro-optic devices …

Since AlN has emerged as an important piezoelectric material for a wide variety of
applications, efforts have been made to increase its piezoelectric response via alloying with …

Piezoresistive sensors are among the oldest and most widely used silicon microsystems. Yet
a book dedicated to their design is strangely lacking and most introductory MEMS textbooks …

The explosive development of wireless and mobile communication systems has
continuously driven rapid technology innovation in component performance and system …