Micromachined resonators: A review

R Abdolvand, B Bahreyni, JEY Lee, F Nabki - Micromachines, 2016 - mdpi.com
This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

[PDF][PDF] CMOS-MEMS Resonators and Oscillators: A Review.

CY Chen, MH Li, SS Li - Sensors & Materials, 2018 - pdfs.semanticscholar.org
In this paper, we summarize research activities and technological progress in the field of
current CMOS-MEMS resonators and oscillators for portable sensor node and timing …

Platform development for CMOS-MEMS multi-gap capacitive transducers

HY Chen, PI Shih, WR Ali, MH Li… - Journal of …, 2023 - ieeexplore.ieee.org
This work, for the first time, presents a platform for designing microelectromechanical system
(MEMS) capacitive transducers featuring multiple transduction gaps implemented by a …

A CMOS-integrated MEMS platform for frequency stable resonators-Part I: Fabrication, implementation, and characterization

CY Chen, MH Li, AA Zope, SS Li - Journal of …, 2019 - ieeexplore.ieee.org
This paper introduces the comprehensive design concepts, procedure, and post-process
flow of a robust manufacturing platform for complementary metal-oxide-semiconductor …

A Sub-150- BEOL-Embedded CMOS-MEMS Oscillator With a 138-dB Ultra-Low-Noise TIA

MH Li, CY Chen, CY Liu, SS Li - IEEE Electron Device Letters, 2016 - ieeexplore.ieee.org
This letter presents the design of a low power, low phase noise monolithic oscillator with a
back-end-of-line-embedded CMOS-MEMS resonator. The proposed CMOS-MEMS oscillator …

A low impedance CMOS-MEMS capacitive resonator based on metal-insulator-metal (MIM) capacitor structure

HY Chen, SS Li, MH Li - IEEE Electron Device Letters, 2021 - ieeexplore.ieee.org
This letter presents the first nano-gap microelectromechanical systems (MEMS) resonator
based on a Metal-Insulator-Metal (MIM) capacitor structure in standard CMOS. We develop …

A CMOS-integrated MEMS platform for frequency stable resonators—Part II: Design and analysis

CY Chen, MH Li, CS Li, SS Li - Journal of …, 2019 - ieeexplore.ieee.org
The Part II of this paper presents the numerical model and experimental validations of the
CMOS-MEMS resonant transducers fabricated by a reliable TiN-composite (TiN-C) platform …

Low-frequency membrane tension measurement of framed membranes in semiconductor manufacturing

YC Lee - Sensors and Actuators A: Physical, 2023 - Elsevier
An analytical technique is proposed for evaluating the membrane tension of the framed
membranes used to protect the photomasks in I/C manufacturing. Two-dimensional wave …

5V-Bias Cmos-Mems Capacitive Resonator with RM< 5KΩ Based On Metal-Insulator-Metal (Mim) Capacitor

HY Chen, PI Shih, MH Li, SS Li - 2022 IEEE 35th International …, 2022 - ieeexplore.ieee.org
This work presents a flexural mode capacitive resonator with a 125nm effective transduction
gap in a 0.18 µm CMOS technology node by implementing a three-step post-fabrication …

MEMS using CMOS wafer

W Fang, SS Li, Y Chiu, MH Li - 3D and Circuit Integration of …, 2021 - Wiley Online Library
This chapter introduces several fabrication technologies, including different complementary
metal oxide semiconductor (CMOS) and post‐CMOS processes, to implement CMOS micro …