CY Chen, MH Li, SS Li - Sensors & Materials, 2018 - pdfs.semanticscholar.org
In this paper, we summarize research activities and technological progress in the field of current CMOS-MEMS resonators and oscillators for portable sensor node and timing …
HY Chen, PI Shih, WR Ali, MH Li… - Journal of …, 2023 - ieeexplore.ieee.org
This work, for the first time, presents a platform for designing microelectromechanical system (MEMS) capacitive transducers featuring multiple transduction gaps implemented by a …
CY Chen, MH Li, AA Zope, SS Li - Journal of …, 2019 - ieeexplore.ieee.org
This paper introduces the comprehensive design concepts, procedure, and post-process flow of a robust manufacturing platform for complementary metal-oxide-semiconductor …
MH Li, CY Chen, CY Liu, SS Li - IEEE Electron Device Letters, 2016 - ieeexplore.ieee.org
This letter presents the design of a low power, low phase noise monolithic oscillator with a back-end-of-line-embedded CMOS-MEMS resonator. The proposed CMOS-MEMS oscillator …
HY Chen, SS Li, MH Li - IEEE Electron Device Letters, 2021 - ieeexplore.ieee.org
This letter presents the first nano-gap microelectromechanical systems (MEMS) resonator based on a Metal-Insulator-Metal (MIM) capacitor structure in standard CMOS. We develop …
CY Chen, MH Li, CS Li, SS Li - Journal of …, 2019 - ieeexplore.ieee.org
The Part II of this paper presents the numerical model and experimental validations of the CMOS-MEMS resonant transducers fabricated by a reliable TiN-composite (TiN-C) platform …
YC Lee - Sensors and Actuators A: Physical, 2023 - Elsevier
An analytical technique is proposed for evaluating the membrane tension of the framed membranes used to protect the photomasks in I/C manufacturing. Two-dimensional wave …
HY Chen, PI Shih, MH Li, SS Li - 2022 IEEE 35th International …, 2022 - ieeexplore.ieee.org
This work presents a flexural mode capacitive resonator with a 125nm effective transduction gap in a 0.18 µm CMOS technology node by implementing a three-step post-fabrication …
W Fang, SS Li, Y Chiu, MH Li - 3D and Circuit Integration of …, 2021 - Wiley Online Library
This chapter introduces several fabrication technologies, including different complementary metal oxide semiconductor (CMOS) and post‐CMOS processes, to implement CMOS micro …