In this study, a comb-type capacitive accelerometer based on a silicon carbide (SiC)
microstructure is presented and investigated by the finite element method (FEM). It has the …

This paper presents the design, simulation, fabrication, and experiment of a triaxial
accelerometer based on differential resonant beams and force-balanced capacitive plates …

In this work, we present a capacitance-to-voltage converter (CVC) for capacitive
accelerometers based on microelectromechanical systems (MEMS). Based on a fully …

In this paper, a three-axis capacitor accelerator has been analyzed, modeled and optimized
using micro-electromechanical systems technology. In the proposed structure, acceleration …

A new configured 3-axis MEMS capacitive accelerometer is presented in this paper. Single
proof mass is employed to detect acceleration in three directions and acceleration could be …

In this work, a capacitance-to-voltage converter based on a fully-differential transimpedance
amplifier (TIA) with programmable gain and bandwidth for MEMS accelerometers is …

In this paper a three-axis capacitor accelerator has been designed, analyzed and optimized
using micro-electromechanical systems technology. The accelerometers are generally …

In this study, a new technique by which multiple physical quantities can be simultaneously
measured with one motion sensor has been proposed by numerical simulations. The sensor …

Capacitive MEMS sensors exhibit an excellent noise performance, high sensitivity and low
power consumption. They offer a huge range of applications, being the accelerometer one of …

An overview on design of MEMS accelerometer involving parallel plate mechanical
suspension is analysed. It is built using single-crystal isotropic silicon on the platform …