The microelectromechanical system (MEMS) vibrating ring gyroscope (VRG) holds
significant promise for angle sensing applications, with its performance highly reliant on the …

MEMS inertial sensors aiming for a high accuracy must anticipate and accommodate for
manufacturing variations during the design stage thereby minimizing reliance on post …

The approach of obtaining modal frequency split information using conventional sideband
excitation signals requires gain calibration and compensation, and sense mode output …

The accurate recording of terrain and strata deformation time series is vital for geodesy and
geophysical studies. However, missing values often occur due to various reasons …

This study investigated the micromechanical properties and creep behavior of hot isostatic
pressed (HIP) beryllium after annealing, deep cryogenic (DCT), and thermal-cold cycling …

Purpose Based on previous results of the existence, uniqueness, and regularity conditions
for a continuous dynamic model for a parallel-plate electrostatic micro-electron-mechanical …

In this work, the detection mode coupling of multi-axis MEMS gyroscopes is investigated in
theory and experiment. First, the impact of bending stress on the transfer behavior of the …

This letter explores intrinsic and extrinsic mechanical stress effects in mode-split, open-loop
micro-electro-mechanical systems (MEMS) gyroscopes. First, the impact of stress on the …

Temperature calibration is commonly used to suppress the bias drift of MEMS inertial
sensors. Temperature compensation reduces the bias drift but cannot eliminate it. We report …

We report on experimental and analytical investigation of temperature effects in a 3.2 mm-
diameter, 57kHz ring gyroscope equipped with 16 capacitive stress sensors. According to …