We demonstrate a novel, to the best of our knowledge, micro-opto-electro-mechanical
system (MOEMS) gyroscope based on the Talbot effect of a single-layer near-field diffraction …

This work reports a comprehensive multiphysics modeling and optimization of a MEMS-
based piezoelectric inertial measurement unit (IMU) sensor using a single proof mass. The …

We developed a driving and sensing system for a multi-axial inertial sensor that operates at
atmospheric pressure using vibrating piezoelectric gyroscope sensors. We developed …

This paper exhibits operating system and performances of a novel single-mass 6-axis
Inertial Measurement Unit (IMU) using piezoelectric detection. The electronic processing …

We developed an orbital driving method without time-sharing for piezoelectric gyroscopes
operating at atmospheric pressure with a square wave signal having a phase difference of …