Review of semiconductor flash memory devices for material and process issues

SS Kim, SK Yong, W Kim, S Kang, HW Park… - Advanced …, 2023 - Wiley Online Library
Abstract Vertically integrated NAND (V‐NAND) flash memory is the main data storage in
modern handheld electronic devices, widening its share even in the data centers where …

Variability-aware machine learning strategy for 3-D NAND flash memories

K Ko, JK Lee, H Shin - IEEE Transactions on Electron Devices, 2020 - ieeexplore.ieee.org
This article proposes a variability-aware machine learning (ML) approach that predicts
variations in the key electrical parameters of 3-D NAND Flash memories. For the first time …

Atomic layer etching of Al2O3 with NF3 plasma fluorination and trimethylaluminum ligand exchange

J Kim, D Shim, Y Kim, H Chae - … of Vacuum Science & Technology A, 2022 - pubs.aip.org
In this study, a cyclic isotropic plasma atomic layer etching (ALE) process was developed for
aluminum oxide that involves fluorination with NF 3 plasma and ligand exchange with …

Quantitative analysis of irregular channel shape effects on charge-trapping efficiency using massive 3D NAND data

C Park, JS Yoon, K Nam, H Jang, MS Park… - Materials Science in …, 2023 - Elsevier
The randomly fluctuating trap efficiency of taper-etched nanowire thin-film transistors was
investigated by measuring a very large statistical ensemble of three-dimensional NAND …

3D NAND Flash Memory Cell Current and Interference Characteristics Improvement with Multiple Dielectric Spacer

YJ Oh, I Lee, Y Suh, D Kang, IH Cho - IEEE Access, 2023 - ieeexplore.ieee.org
To achieve high density, the spacer length of three dimensional (3D) NAND device has
been scaled down. When the program/erase cycle repeats, problems such as electrons …

Novel program scheme of vertical NAND flash memory for reduction of Z-interference

S Yi, J Kim - Micromachines, 2021 - mdpi.com
Minimizing the variation in threshold voltage (Vt) of programmed cells is required to the
extreme level for realizing multi-level-cells; as many as even 5 bits per cell recently. In this …

Investigation of poly silicon channel variation in vertical 3D NAND flash memory

I Lee, DH Kim, D Kang, IH Cho - IEEE Access, 2022 - ieeexplore.ieee.org
Since the most of three dimensional (3D) NAND devices' channel is composed of polysilicon
grain, the actual 3D NAND channel has a wave-shaped channel, not uniform shape. In this …

Analysis of residual stresses induced in the confined 3D NAND flash memory structure for process optimization

EK Jang, IJ Kim, CA Lee, C Yoon… - IEEE Journal of the …, 2022 - ieeexplore.ieee.org
In flash memory technology, mechanical stress is considered as one of the major factors that
can influence the device performance. Furthermore, mechanical stress can have a greater …

Effect of the blocking oxide layer with asymmetric taper angles in 3-D NAND flash memories

JG Lee, WJ Jung, JH Park, KH Yoo… - IEEE Journal of the …, 2021 - ieeexplore.ieee.org
The tapered channel effect is a major concern in three-dimensional (3-D) NAND technology
because the effect causes differences in the electrical characteristics, including the threshold …

Three-Dimensional Resistive Random-Access Memory Based on Stacked Double-Tip Silicon Nanowires for Neuromorphic Systems

WJ Lee, B Kim, M Koo, Y Kim - ACS Applied Electronic Materials, 2024 - ACS Publications
Resistive random-access memory (RRAM) has garnered attention as a synaptic device for
neuromorphic systems. However, RRAM typically suffers from various issues, such as a high …