Capacitive accelerometers are essential components in a wide range of electronic devices,
enabling crucial functionalities such as touch sensitivity and proximity detection. Ensuring …

In this study, a comb-type capacitive accelerometer based on a silicon carbide (SiC)
microstructure is presented and investigated by the finite element method (FEM). It has the …

Capacitive sensors are popular, especially due to the possibility to be integrated together
with the readout circuit. In particular, differential implementations are intrinsically insensitive …

Differential capacitive sensors, especially if implemented as MEMS (Micro Electro
Mechanical Systems) are a widely employed sensor solution, especially after the …

Measuring omnidirectional acceleration is highly important for robust control of the vehicle
states. A novel omnidirectional accelerometer with three piezoelectric curved-fibers is …

In a world where great efforts are spent designing and creating more complex, yet efficient
systems, sensing elements and related readout circuits, which constitute an integral part of …

By using the capacitive measurement principle, high-performance micromechanical
accelerometers provide low noise and power consumption, cost efficiency, and reliability …

Modern designs of sensitive elements of many MEMS, including micromechanical
accelerometers, contain suspension elements, with the help of which the inertial mass is …

There is a wide variety of designs of the suspensions used in capacitive micromechanical
accelerometers and other MEMS. In this paper, the most common designs of silicon …

Для обеспечения надежной работы и стабильности параметров датчиков необходимо
учитывать воздействие внешних факторов уже на этапе проектирования конструкции …