Silicon carbide has attracted considerable attention in recent years as a potential material
for sensor devices. This paper reviews the current status of SiC technology for a wide range …

Advances in siliconcarbide microfabrication and growth process optimization for
siliconcarbide nanostructures are ushering in new opportunities for microdevices capable of …

Photonic integrated circuits (PICs) based on lithographically patterned waveguides provide
a scalable approach for manipulating photonic bits, enabling seminal demonstrations of a …

With the increasing requirements for microelectromechanical systems (MEMS) regarding
stability, miniaturization and integration, novel materials such as wide band gap …

In recent years, several new applications of SiC (both 4H and 3C polytypes) have been
proposed in different papers. In this review, several of these emerging applications have …

We report experimental demonstrations of electrostatically actuated, contact-mode
nanoelectromechanical switches based on very thin silicon carbide (SiC) nanowires (NWs) …

A method for ultrafast etching of single crystal 6H-SiC by integrating a femtosecond laser
modification and inductively coupled plasma (ICP) etching is proposed in this paper. The …

In this paper, we report on a novel surface micromachining process technology for the
fabrication of microelectromechanical systems in SiC. Single-crystal SiC suspended …

This chapter looks at the role of silicon carbide (SiC) in microsystem technology. It starts with
an introduction into the wide bandgap (WBG) materials and the properties that make them …

It has been a challenge to develop pressure sensors that can work in harsh environments. In
this work, a piezoresistive n-type 4H-SiC pressure sensor is demonstrated, capable of …