State of the art in thin film thickness and deposition rate monitoring sensors

C Buzea, K Robbie - Reports on Progress in Physics, 2005 - iopscience.iop.org
In situ monitoring parameters are indispensable for thin film fabrication. Among them,
thickness and deposition rate control are often the most important in achieving the …

Control of power law scaling in the growth of silicon nanocolumn pseudo-regular arrays deposited by glancing angle deposition

C Buzea, G Beydaghyan, C Elliott, K Robbie - Nanotechnology, 2005 - iopscience.iop.org
Nanocolumn pseudo-regular arrays of silicon with controlled aspect ratio and porosity are
fabricated by electron-beam evaporation using the glancing angle deposition (GLAD) …

A theoretical model for the electrical properties of chromium thin films sputter deposited at oblique incidence

A Besnard, N Martin, L Carpentier… - Journal of Physics D …, 2011 - iopscience.iop.org
Chromium thin films are prepared by magnetron sputtering using the glancing angle
deposition (GLAD) method. The electrical conductivity of the films exhibiting an inclined …

Ex situ ellipsometric investigation of nanocolumns inclination angle of obliquely evaporated silicon thin films

G Beydaghyan, C Buzea, Y Cui, C Elliott… - Applied Physics …, 2005 - pubs.aip.org
We propose an application of spectroscopic ellipsometry pertinent to the characterization of
nanostructure inclination of oblique thin films. This technique is employed ex situ in the …

Low-temperature vapour–liquid–solid (VLS) growth of vertically aligned silicon oxide nanowires using concurrent ion bombardment

M Bettge, S MacLaren, S Burdin, JG Wen… - …, 2009 - iopscience.iop.org
Vertically aligned silicon oxide nanowires can be synthesized over a large area by a low-
temperature, ion-enhanced, reactive vapour–liquid–solid (VLS) method. Synthesis of these …

Oxidation of evaporated porous silicon rugate filters

K Robbie, Y Cui, C Elliott, K Kaminska - Applied optics, 2006 - opg.optica.org
Rugate filters are thin-film optical interference coatings with sinusoidal variation of the
refractive index. Several of these filters were fabricated with glancing angle deposition …

[PDF][PDF] Architecture of thin solid films by the GLAD technique

N Martin, K Robbie, L Carpentier - Nanomaterials and Surface …, 2013 - iste.co.uk
Table of Contents Page 1 Table of Contents Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . xv Jamal TAKADOUM Chapter 1. Architecture of Thin Solid Films by the GLAD …

[PDF][PDF] Polycrystalline CuIn3Se5 thin film photoabsorber deposited by the pulsed laser deposition technique

A Tverjanovich, S Bereznev… - Proceedings of the …, 2009 - pdfs.semanticscholar.org
Polycrystalline CuIn3Se5 photoabsorber thin films were deposited onto glass/ITO substrates
by using the pulsed laser deposition (PLD) technique. Stoichiometric CuIn3Se5 samples for …

Неравновесность плотной электродуговой плазмы, обусловленная переносом резонансного излучения

ВА Жовтянский - Известия высших учебных заведений. Химия и …, 2012 - cyberleninka.ru
Оценивается роль резонансного излучения плазмообразующих атомов в проблеме
отклонения состояния плазмы от равновесного на примере …

Structural, chemical and magnetic properties of nickel vertical posts obtained by glancing angle deposition technique

J Potočnik, M Nenadović, BM Jokić, M Popović… - Science of …, 2017 - vinar.vin.bg.ac.rs
In this work, Glancing Angle Deposition technique was used for obtaining nanostructured
nickel thin film with vertical posts on glass substrate which was positioned 75 degrees with …