The classical dynamical theory of X-ray diffraction is expanded to the special case of
transversely restricted wavefronts of the incident and reflected waves. This approach allows …

Laterally periodic nanostructures have been investigated with grazing-incidence small-
angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface …

Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for
the contactless and destruction-free investigation of nanostructured surfaces. However, due …

Increasing miniaturization and complexity of nanostructures require innovative metrology
solutions with high throughput that can assess complex 3D structures in a non-destructive …

The diffraction properties of phase gratings with the period D= 1.6, 1.0 and 0.5 µm fabricated
on an Si (111) crystal by e-beam lithography were studied by triple-axis X-ray diffraction. A …

As the industry continues to progress along the ITRS roadmap, not only the device
dimensions shrink, but the architectures also increase in 3D complexity. Therefore, new …

Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for
the contactless and destruction-free investigation of nanostructured surfaces. However, due …

One tendency in present material research is the increasing ability to structure solids in one,
two and three dimensions at a sub-micrometer scale. Based on various material systems …

Recently, Mo/Si multilayer reflectors have been gaining industry interest as a promising
choice for the next generation extreme ultraviolet mask material for printing sub 70 nm …

Теоретически и экспериментально исследовано влияние азимутальной ориентации
многослойной дифракционной решетки (МДР) на когерентное и диффузное рассеяние …