This contribution presents an overview of advances in scanning micromirrors based on
MEMS (Micro-electro-mechanical systems) technologies to achieve beam scanning for OCT …

In the past decades, microfluidic chips have been one of the hottest research topics in the
“lab-on-a-chip” field. However, it is still a challenge for design the perfect microchannels with …

Micro embossing is an effective way to fabricate a polymethyl methacrylate (PMMA)
specimen into micro-scale array structures with low cost and large volume production. A new …

Glass hot embossing is a well-established and cost-effective manufacturing method for glass
microstructures. However, the spatial volume affects deformation behaviors in closed mold …

Glass microlens arrays (MLAs) have tremendous prospects in the fields of optical
communication, sensing and high-sensitivity imaging for their excellent optical properties …

Glass‐embossing technology has attracted great attention due to its promise of low‐cost and
environmentally conscious fabrication of well‐defined and controllable surfaces and …

This paper investigates the parameter optimization of isotropic bulk silicon microscale
etching using an inductively coupled plasma-deep reactive ion etching (ICP-DRIE) system …

This Letter reports on the generation of glass-based axicons realized at the wafer level by
means of microfabrication. The technique is based on micro glass blowing allowing parallel …

This paper presents an experimental study of capabilities to fabricate high aspect-ratio
microstructures in glass. The fabrication was done by molding borosilicate glass in deep …

We present a micromachined vertical scanner with a $4\times 4$ array of suspended'spider-
type'micromirrors which is a key component of a multi-channel'active'Mirau …