In this work, the fine structure macro-porous silicon (macroPS) substrate was prepared by photo-electro-chemical etching of n-type silicon wafer. Ultraviolet illumination condition of …
N Rosli, MM Halim, KM Chahrour… - ECS Journal of Solid …, 2020 - iopscience.iop.org
In this study, metal-semiconductor-metal (MSM) photodetectors (PDs) was fabricated on the macroporous silicon substrate,(mPS) followed by growth of zinc oxide (ZnO) on the mPS …