Flexible electronics have received considerable attention in academies and industries for
their promising applications in enormous fields, such as flexible displays, wearable sensors …

Imprint lithography is emerging as an alternative nano-patterning technology to traditional
photolithography that permits the fabrication of 2D and 3D structures with< 100nm …

Photopolymers broadly comprise monomers, oligomers, polymers, or mixtures of the
aforementioned materials that upon exposure to light undergo photochemical reactions that …

In this paper, we demonstrate high-density nanolithography by utilizing surface plasmons
(SPs). SPs are excited on an aluminum substrate perforated with 2-D hole arrays using a …

This new edition of the bestselling Microlithography: Science and Technology provides a
balanced treatment of theoretical and operational considerations, from elementary concepts …

Nanoscience is not just physics, chemistry, engineering, or biology, but rather an integration
of all of these disciplines. The first comprehensive and interdisciplinary text of its kind …

The escalating cost of next generation lithography (NGL) is driven in part by the need for
complex sources and optics. The cost for a single NGL tool could soon exceed $50 million, a …

Continuous and scalable nanopatterning over flexible substrates is highly desirable for both
commercial and scientific interests, but is difficult to realize with traditional photolithographic …

All monomers were purchased from Sigma Aldrich (Milwaukee, WI) and used as received
unless otherwise mentioned. The silanes n-octadecyltriethoxysilane (OTES) and 3 …

Nanoimprint lithography (NIL) has the potential capability of high resolution with critical
dimension uniformity that is suited for patterning shrinkage, as well as providing a low cost …