Theory and molecular simulations of plasma sputtering, transport and deposition processes

P Brault, AL Thomann, M Cavarroc - The European Physical Journal D, 2023 - Springer
The present review provides an overview of the basic theory of sputtering with recent
models, focusing in particular on sputtered atom energy distribution functions. Molecular …

Ion beam irradiation of nanostructures: sputtering, dopant incorporation, and dynamic annealing

A Johannes, H Holland-Moritz… - … Science and Technology, 2015 - iopscience.iop.org
Nanostructured materials are today subject to intense research, as their mesoscopic
properties will enable a variety of new applications in the future. They can be grown with …

Roadmap for focused ion beam technologies

K Höflich, G Hobler, FI Allen, T Wirtz, G Rius… - Applied Physics …, 2023 - pubs.aip.org
The focused ion beam (FIB) is a powerful tool for fabrication, modification, and
characterization of materials down to the nanoscale. Starting with the gallium FIB, which was …

Deducing lunar regolith porosity from energetic neutral atom emission

PS Szabo, AR Poppe, H Biber, A Mutzke… - Geophysical …, 2022 - Wiley Online Library
The porosity of the upper layers of regolith is key to the interaction of an airless planetary
body with precipitating radiation, but it remains difficult to characterize. One of the effects that …

[HTML][HTML] Ion-induced nanopatterning of silicon: Toward a predictive model

SA Norris, MJ Aziz - Applied Physics Reviews, 2019 - pubs.aip.org
We review recent progress toward the development of predictive models of ion-induced
pattern formation on room-temperature silicon, with a particular emphasis on efforts to …

Charge‐State‐Enhanced Ion Sputtering of Metallic Gold Nanoislands

GL Szabo, BR Jany, H Muckenhuber, A Niggas… - Small, 2023 - Wiley Online Library
Experimental results on the charge‐state‐dependent sputtering of metallic gold nanoislands
are presented. Irradiations with slow highly charged ions of metallic targets were previously …

Probing the limitations of Sigmund's model of spatially resolved sputtering using Monte Carlo simulations

G Hobler, RM Bradley, HM Urbassek - Physical Review B, 2016 - APS
Sigmund's model of spatially resolved sputtering is the underpinning of many models of
nanoscale pattern formation induced by ion bombardment. It is based on three …

Ion beam nanopatterning of III-V semiconductors: consistency of experimental and simulation trends within a chemistry-driven theory

O El-Atwani, SA Norris, K Ludwig, S Gonderman… - Scientific reports, 2015 - nature.com
Several proposed mechanisms and theoretical models exist concerning nanostructure
evolution on III-V semiconductors (particularly GaSb) via ion beam irradiation. However …

Sputter yield of curved surfaces

HM Urbassek, RM Bradley, ML Nietiadi, W Möller - Physical Review B, 2015 - APS
The mean sputter yield produced by the impact of a single ion depends on the radii of
curvature of the target surface at the point of impact. Using the Sigmund model of ion …

Distinguishing physical mechanisms using GISAXS experiments and linear theory: the importance of high wavenumbers

SA Norris, JC Perkinson, M Mokhtarzadeh… - Scientific reports, 2017 - nature.com
In this work we analyze GISAXS measurements of the structure factor of Si surfaces evolving
during 1 keV Ar+ ion bombardment. Using newly-developed methods sensitive to the full …