Z Shen, S Jing, Y Heng, Y Yao, KN Tu… - Applied Physics Reviews, 2023 - pubs.aip.org
The development of big data and artificial intelligence technology is increasing the need for electronic devices to become smaller, cheaper, and more energy efficient, while also having …
SW Hutchings, N Johnston, I Gyongy… - IEEE Journal of Solid …, 2019 - ieeexplore.ieee.org
A 256 256 single-photon avalanche diode (SPAD) sensor integrated into a 3-D-stacked 90- nm 1P4M/40-nm 1P8M process is reported for flash light detection and ranging (LIDAR) or …
Y Kagawa, N Fujii, K Aoyagi… - 2016 IEEE …, 2016 - ieeexplore.ieee.org
We have successfully mass-produced novel stacked back-illuminated CMOS image sensors (BI-CIS). In the new CIS, we introduced advanced Cu2Cu hybrid bonding that we had …
E Beyne, SW Kim, L Peng, N Heylen… - 2017 IEEE …, 2017 - ieeexplore.ieee.org
This paper presents a novel approach to face-to-face wafer-to-wafer (W2W) bonding using SiCN-to-SiCN dielectric bonding, in combination with direct Cu-Cu bonding using Cu pads …
We present the first 3D-stacked backside illuminated (BSI) single photon avalanche diode (SPAD) image sensor capable of both single photon counting (SPC) intensity, and time …
S Lindner, S Pellegrini, Y Henrion… - IEEE Electron …, 2017 - ieeexplore.ieee.org
We present a complete pixel based on a single-photon avalanche diode (SPAD) fabricated in a backside-illuminated (BSI) 3D IC technology. The chip stack comprises an image …
Analog and digital SiPMs have revolutionized the field of radiation instrumentation by replacing both avalanche photodiodes and photomultiplier tubes in many applications …
Z Wang - Microelectronic Engineering, 2019 - Elsevier
As a powerful enabling technology, three-dimensional (3D) integration, which uses wafer bonding to integrate multiple wafers in the vertical direction and uses through‑silicon-vias …
J Jourdon, S Lhostis, S Moreau… - 2018 IEEE …, 2018 - ieeexplore.ieee.org
Hybrid bonding is a high-density technology for 3D integration but further interconnect scaling down could jeopardize electrical and reliability performance. A study of the influence …