Current status of AlInN layers lattice-matched to GaN for photonics and electronics

R Butté, JF Carlin, E Feltin, M Gonschorek… - Journal of Physics D …, 2007 - iopscience.iop.org
We report on the current properties of Al 1− x In x N (x≈ 0.18) layers lattice-matched (LM) to
GaN and their specific use to realize nearly strain-free structures for photonic and electronic …

Mass transfer techniques for large-scale and high-density microLED arrays

F Chen, J Bian, J Hu, N Sun, B Yang… - … Journal of Extreme …, 2022 - iopscience.iop.org
Inorganic-based micro light-emitting diodes (microLEDs) offer more fascinating properties
and unique demands in next-generation displays. However, the small size of the microLED …

Recent progress in the growth of highly reflective nitride-based distributed Bragg reflectors and their use in microcavities

R Butté, E Feltin, J Dorsaz, G Christmann… - Japanese journal of …, 2005 - iopscience.iop.org
The growth of highly-reflective nitride-based distributed Bragg reflectors (DBRs) and their
use in vertical cavity structures is reviewed. We discuss the various nitride material systems …

A conductivity‐based selective etching for next generation GaN devices

Y Zhang, SW Ryu, C Yerino, B Leung… - … status solidi (b), 2010 - Wiley Online Library
Electrochemical etching having large selectivity based on the conductivity of n‐type GaN
was investigated to demonstrate the feasibility of novel optical and microelectromechanical …

Demonstration of GaN-based vertical-cavity surface-emitting lasers with buried tunnel junction contacts

SG Lee, CA Forman, J Kearns, JT Leonard… - Optics …, 2019 - opg.optica.org
We report III-nitride vertical-cavity surface-emitting lasers (VCSELs) with buried tunnel
junction (BTJ) contacts. To form the BTJs, GaN TJ contacts were etched away outside the …

Sub-milliampere-threshold continuous wave operation of GaN-based vertical-cavity surface-emitting laser with lateral optical confinement by curved mirror

T Hamaguchi, H Nakajima, M Tanaka, M Ito… - Applied Physics …, 2019 - iopscience.iop.org
The continuous wave operation of a gallium-nitride-based vertical-cavity surface-emitting
laser (GaN-based VCSEL) that uses boron ion implantation for lateral current confinement …

Integrated photonics on silicon with wide bandgap GaN semiconductor

N Vico Triviño, U Dharanipathy, JF Carlin… - Applied Physics …, 2013 - pubs.aip.org
We report on GaN self-supported photonic structures consisting in freestanding waveguides
coupled to photonic crystal waveguides and cavities operating in the near-infrared. GaN …

The fabrication of large-area, free-standing GaN by a novel nanoetching process

Y Zhang, Q Sun, B Leung, J Simon, ML Lee… - …, 2010 - iopscience.iop.org
A simple yet versatile nanoetching process in porosifying and'machining'GaN is reported in
this work. By combining different porosifying conditions through potentiostatic modulation or …

A liftoff process of GaN layers and devices through nanoporous transformation

Y Zhang, B Leung, J Han - Applied Physics Letters, 2012 - pubs.aip.org
A process to slice and separate GaN device layers for vertical light emitting diodes (LEDs) is
presented through a developed electrochemical anodization process to create nanoporous …

High quality nitride based microdisks obtained via selective wet etching of AlInN sacrificial layers

D Simeonov, E Feltin, A Altoukhov, A Castiglia… - Applied Physics …, 2008 - pubs.aip.org
The authors report a technique for selective wet chemical etching of an AlInN sacrificial layer
lattice-matched to GaN for the fabrication of air-gap photonic structures. It is used to …