The unique plasma-specific features and physical phenomena in the organization of
nanoscale soild-state systems in a broad range of elemental composition, structure, and …

Block copolymer (BCP) represents a special type of polymeric system where each of the
polymer chains is composed of two or more chemically distinct homopolymer blocks that are …

Block polymers incorporating highly incompatible segments are termed “high χ” polymers,
where χ is the Flory–Huggins interaction parameter. These materials have attracted a great …

Block copolymers (BCPs) and their directed self‐assembly (DSA) has emerged as a
realizable complementary tool to aid optical patterning of device elements for future …

Optical metamaterials are artificially engineered architectures that exhibit desired optical
properties not found in nature. Bespoke design requires the ability to define shape, size …

In this study, we developed a method to qualify the plasma etching result in high-aspect-ratio
trench with ion tilting using the natural sheath curvature at the wafer edge. Etching was …

This paper is a perspective on progress that has been made in the use of block copolymers
as potential, non-UV lithographically formed, on-chip etch masks for the fabrication of ultra …

Photolithgraphy has been the mainstay for meeting the demand for continuous shrinkage in
the semiconductor industry, but it is facing limitations for sub-30 nm patterning.[1] Block …

As a porous and network materials consisting of metals and organic ligands, metal‐organic
frameworks (MOFs) have become one of excellent crystalline porous materials and play an …

Directed self-assembly of block copolymers is a bottom-up approach to nanofabrication that
has attracted high interest in recent years due to its inherent simplicity, high throughput, low …